Product
VTC-200P Anti-Corrosion Spin Coater
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Model：
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VTC-200P Anti-Corrosion Spin Coater |
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Brief Introduction：
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VTC-200P is Anti-Corrosion Spin Coater made of Polypropylene (PP) material, which can be used for strong acidic or alkali solution, especially suitable for use inside glovebox under Ar gas. Four vacuum chucks are included for coating wafer from 10 mm to 6". Digital control box is separated from spin coater which allow you operate in the remote location. The spinning speed is variable from 500-8000 rpm with two programmable segments. The package includes the oilless vacuum pump and 20ml syringe for immediate use. |
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Product Usage：
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Coat liquid and sol-gel on the substrate |
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Structure
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Case and spin disk made of Polypropylene (PP) to resist most of the corrosive solutions. |
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Digital control box is separated from spin coater. |
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One filter is included in standard package. It is used to connect the pump and coater for preventing waste water from flowing into the pump. |
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One oil-less vacuum pump is included in the standard package |
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Input Power
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Default 220VAC, 50/60Hz, single phase, 1000W Max. |
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110V is available in optional bar ( with 1500W transformer ) |
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A power socket on the back of the Digital control box is used to supply power for the vacuum pump. (The output voltage of this power socket depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.) |
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Chamber &Vacuum Chuck
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Chamber diameter: 150 mm |
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4 sets of PP anti-corrosive vacuum chucks with different sizes ( Φ21mm、Φ38mm、Φ60mm、Φ100mm ), which can hold substrate from 10mm Dia to 6" Dia. |
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If your sample < 10 mm, please order rubber cup from us at extra cost |
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Spin Speed
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Digital control panel with two programmable segments of different spin times and speeds |
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Maximum programmable spin time 6*60s = 360s |
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500 - 8000 RPM adjustable spinning speed at each segment |
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Liquid Injecting
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20mL syringe is included to contain the coating material. |
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Product Dimensions
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Spin Coater:25.2cm(Φ) x 41cm(H) |
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Digital controller: 23cm(L) x32cm(W) x16cm(H) |
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Motor
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24VDC, Brushless, 200W max.: |
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Net Weight
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25 kg |